By Center for Functional Nanomaterials Brookhaven
Dual-beam systems capable of simultaneous focused ion beam milling and SEM imaging. The systems are capable of high-resolution SEM (1 nm), FIB (5 nm), and STEM (0.8 nm) imaging. Further capabilities include gas injector for electron or ion beam-assisted deposition of platinum and TEOS (dielectric), x-ray detector for EDS analysis, nano-manipulator probe, and in-situ sample electrical characterization.
