Vistec Electron Beam offers a dedicated data preparation software and hardware package, which is perfectly tailored to the specific requirements of its Variable Shaped Beam systems. Customized high performance computing hardware, combined with Vistec’s innovative software program ePLACE enables fitted fracturing and correction algorithms for fast and accurate data processing in applied research as well as industrial applications. ePLACE is licensed by Vistec Electron Beam GmbH. Application support is offered for the complete data preparation software. ePLACE (e-beam direct write and mask data Preparation layout console.) is a powerful and comprehensive software product for layout data processing and optimization which has been specifically adapted to Vistec’s Variable Shaped Beam systems. Leading edge Proximity Effect Correction (PEC) for electron-beam lithography systems is optionally available, and fully integrated in the ePLACE package.
