NW
Precision DepositionFabrication & Surface Engineering

Oxide Deposition

By Applied Nanotools Inc.

Cladding oxide to improve device performance. Available in MPW and dedicated runs. If the photonic devices require isolation from the outside environment, silicon dioxide cladding is deposited using chemical vapour deposition (CVD). Our standard oxide cladding thickness is 2.2 µm. The oxide deposition process can be combined with the tri-layer metallization process to fabricate active photonic devices with thermal tuning.