By Montana State University - Montana Microfabrication Facility (MMF)
Angstrom AMOD Evaporator — Internal $69/hr, External Academic $103.50/hr, External Industrial $138/hr, ~Training time 4 hrs Angstrom Sputter System — Internal $104/hr, External Academic $179/hr, External Industrial $208/hr, ~Training time 4 hrs Denton BTT - Thermal Evaporator — Internal $94/hr, External Academic $145/hr, External Industrial $188/hr, ~Training time 4 hrs Angstrom EvoVac Evaporator — Internal $69/hr, External Academic $103.50/hr, External Industrial $138/hr, ~Training time 4 hrs Anric AT-410 ALD — Internal $45/hr, External Academic $96/hr, External Industrial $135/hr, ~Training time 3 hrs ECSI Fibrotools IKO JK Electroplater — Internal $78/hr, External Academic $129/hr, External Industrial $156/hr, ~Training time 3 hrs Use of the evaporation and sputter systems may include a setup charge if a target change is required. Material usage fees apply for Au and Pt.
