By Upstream Technology Platform PTA
The PTA provides comprehensive technical expertise to support a wide array of projects in nanoscience and micro-nanotechnology. With state-of-the-art methods and complementary equipment for lithography, deposition, and etching, the platform ensures precise integration of nano-objects and nanomaterials, as well as the patterning of thin layers at the nanometric scale. Our facility accommodates various substrate sizes, from small 5 x 5 mm² samples to 100 mm wafers, and offers the flexibility to process a broad range of materials while maintaining stringent contamination control protocols
