By Institut Catala de Nanociencia i Nanotecnologia (ICN2)
Thin film deposition is a process whereby materials - generally precious metals or oxides - are deposited onto a substrate or lithography sample. This can be achieved in a variety of ways such as sputtering, electroplating, evaporation, or CVD. ICN2 Nanofabrication Facility offers a range of different thin film deposition techniques and instruments, which are briefly explained here. Process - Instrument - Main property: E-beam Evaporation - AJA Orion - Directional coating Ebeam + sputtering - Alliance Concept EVA601 - Directional and Conformal coating
