Reliability is a central consideration for PiezoMEMS devices intended for real-world applications. Over time, electrical cycling and mechanical stress can lead to material degradation or performance drift. Environmental exposure such as moisture or hydrogen ingress can cause the material properties of PZT films to drift and accelerate breakdown. Silex addresses this through ALD-deposited Al₂O₃ passivation layers, which act as moisture barriers to protect the piezoelectric film and preserve long-term electrical stability.
