To address ever-growing metrology challenges, Nova has revolutionized dimensional metrology with the introduction of a hybrid measurement technique. Combining data gathered from various toolsets (e.g. optical CD, SEM, AFM), hybrid metrology reveals superior information from measured samples to enhance process insights. This technique leverages a hybridization toolset to decouple parameters that otherwise would be tightly coupled in individual toolsets. As a result, Nova’s hybrid solutions improve measurement performance and m
