Our field emission (Schottky) SEM can capture images of thin films, devices, and nanoparticles, to support analysis and applications development. The main capabilities of the system include: * In-lens SE imaging * SE-II imaging (ET detector) * Backscatter imaging * Wide range of imaging voltages (0.2 – 30 kV) * Magnification up to 900,000X * Six-axis stage * 200 mm wafer loadlock (6” stage travel)
Compiled from http://www.ajaint.com
