This depends on mold uniformity, pattern geometry, and the resin used; however, under appropriate conditions, control down to approximately 20 nm is possible. We can support sizes from approximately φ10 mm. This depends on the curing energy of the resin used, but under typical conditions it is within 3 minutes per piece. Pitch accuracy is less than 0.05 nm, and pattern geometry accuracy is ±5%. With nanoimprint molding, there is almost no shape difference from the master mold. We can support gentle curved surfaces (waviness of approximately 1–2 mm per Φ100 mm). We support UV-curable resins and thermosetting resins. We have a proven track record with materials such as PDMS, epoxy, and polyimide. The main resins used for optical components offer reliability equivalent to automotive grade. We have experience with both filled and unfilled resins. Our highest achieved refractive index is approximately 1.9. Depending on the pattern design, we have achieved transfer with an aspect ratio exceeding 10. This depends on the pattern design, but we have a track record of molding inverse-taper shapes. We have a track record of molding up to an aspect ratio of approximately 7. Using our proprietary fluid forming technology, we achieve uniform pressure distribution across the entire surface and low-pressure molding, enabling molding on compound semiconductor substrates while minimizing damage to the substrate. By appropriately selecting the substrate and resin materials, we can provide products with reflow resistance. We have mass production experience with biochips, optical lenses, optical sensors, and more. For our prototyping and mass production, we use sheet-fed nanoimprint equipment.
