A technique that allows thin films to be deposited onto the surface of a substrate Materials supported by Trion’s tools for DEPOSITION include: - Oxide: TEOS + O2 - Oxide – faster deposition: SiH4 + N20 +N2 - Nitride: NH3 + DES + N2 - Nitride – faster deposition: N2 + NH3 + SiH4 - Silicon carbide: Trimethylsilane or Methane (CH4) & SiH4
