ARXPS involves varying the collection angle of the ejected photoelectrons relative to the surface normal. By tilting the sample relative to the AXIS of the electrostatic lens column of the spectrometer, the sampling depth is decreased. With photoelectrons collected at an angle of 75 degrees from the surface normal, the sampling depth is decreased from 10 nm to 2-3 nm. Spectra acquired over a range of collection angles can be used to reconstruct a concentration depth profile using algorithms available in our ESCApe software.
