NW
Cleanroom & FoundryInfrastructure & Training

Micro-fabrication suite

By Queen Mary University of London

The CREATE Lab houses a suite of equipment for photolithography and fabrication of microfluidic devices and micropatterned surfaces. Key pieces of equipment include a spin coater (SPIN150i, SPS), UV masking system (KUB-6, Kloe), hot plates, plasma oxidiser (Zepto, Henniker), and a thermoevaporator (Moorfield nanoPVD). In addition, the lab provides an optical profilometer (Profilm 3D, Filmetrics) for characterisation of microfabricated surfaces, and syringe pumps for introduction of dynamic fluid flow.