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Rapid Probe Microscope

Infinitesima

Scanning Probe Microscopy (SPM)

Product Overview

The Infinitesima Rapid Probe Microscope (RPM) is a modular scanning probe microscopy (SPM) system. It is designed for integration into other, larger systems ("host tools"), such as e-beam mask repair systems or wafer metrology platforms, for operation in either air or vacuum. The RPM is intended to provide hybrid metrology capabilities by combining its scanning probe technology with the host system's technology (e.g., e-beam). Its first commercial implementation is within the Zeiss MeRiT® neXT mask repair system.
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Product Description

The Infinitesima Rapid Probe Microscope (RPM) is a modular scanning probe microscopy (SPM) system. It is designed for integration into other, larger systems ("host tools"), such as e-beam mask repair systems or wafer metrology platforms, for operation in either air or vacuum. The RPM is intended to provide hybrid metrology capabilities by combining its scanning probe technology with the host system's technology (e.g., e-beam). Its first commercial implementation is within the Zeiss MeRiT® neXT mask repair system.

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Infinitesima

Infinitesima is a UK-based company that has developed a revolutionary high-speed scanning probe microscopy (SPM) technology, the Rapid Probe Microscope (RPM). Their system is designed for in-line process control and metrology in the advanced semiconductor industry, enabling atomic-scale imaging at manufacturing speeds.

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