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MetrologyOctober 12, 2026 · 1 min read

Delmic Launches SPARC 3.0 Cathodoluminescence Platform for SEM

Delmic Launches SPARC 3.0 Cathodoluminescence Platform for SEM. Image: Delmic
Delmic Launches SPARC 3.0 Cathodoluminescence Platform for SEM. Image: Delmic

Liverpool, 12 October 2026. Delmic launched SPARC 3.0, the latest generation of its cathodoluminescence (CL) platform for scanning electron microscopy (SEM), at the International Microscopy Congress (IMC21) in Liverpool.

SPARC 3.0 combines multimodal cathodoluminescence imaging with an increasingly automated acquisition workflow. The platform supports up to eight imaging modes, including intensity, monochromatic, hyperspectral, angle-resolved, polarimetry, energy-momentum, photoluminescence and time-resolved imaging. Its spectral coverage extends from 185 nm in the deep UV to 1700 nm in the near-infrared.

SPARC 3.0 incorporates automated calibration and mirror-alignment routines, reducing manual configuration. Point-by-point intensity mapping, drift correction and stage tiling can also be automated. Acquisition settings can be saved as measurement recipes and recalled for subsequent experiments.

The system is operated through Delmic's ODEMIS software. CL data can be visualised alongside SEM images and exported in open formats including HDF5, PNG, OME-TIFF and raw text. SPARC incorporates an ultra-flat parabolic mirror that captures 89% of emitted light, with sub-2 µm positioning accuracy.

SPARC 3.0 is designed to fit any major SEM brand, including new and existing instruments. It is now available through AXT in Australia and New Zealand.

Source: Delmic news