Technical data of the KOALA wet chemistry scaling tool: - Spin-on deposition of perovskite precursor solutions (up to 4 vials) with thermal management - Spin coating of contact materials - Wafer handling and batch processing are all automated and on up to M6 wafer sizee.
The KOALA PVD and sputtering system is large enough to reproduce industrial production and contributes to the development of new industry-related processes, materials and solar cells. KOALA was built and technologically implemented together with the industrial partners Von Ardene and MBraun. Technical data of the KOALA vacuum process tool: - Evaporation of perovskite precursor materials (up to 5 sources) with in-situ analysis - Evaporation of contact materials - DC and pulsed DC-sputtering from 2+2 tube targets - ALD SnO x and AlO x layer - Analytics & Heat/Cool Chamber - Mask handling and batch processing are all automated and on up to M6 wafer size.
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