The KOALA PVD and sputtering system is large enough to reproduce industrial production and contributes to the development of new industry-related processes, materials and solar cells. KOALA was built and technologically implemented together with the industrial partners Von Ardene and MBraun. Technical data of the KOALA vacuum process tool: - Evaporation of perovskite precursor materials (up to 5 sources) with in-situ analysis - Evaporation of contact materials - DC and pulsed DC-sputtering from 2+2 tube targets - ALD SnO x and AlO x layer - Analytics & Heat/Cool Chamber - Mask handling and batch processing are all automated and on up to M6 wafer size.
Technical data of the KOALA wet chemistry scaling tool: - Spin-on deposition of perovskite precursor solutions (up to 4 vials) with thermal management - Spin coating of contact materials - Wafer handling and batch processing are all automated and on up to M6 wafer sizee.
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