HRL’s metrology module provides advanced electron, laser, and optical imaging and measurement systems for many research and failure analysis applications. Our capabilities cover scales from micrometers to angstroms with structural, compositional, and quantitative information for nano- and microdevice fabrication and materials science. HRL’s PCM test module provides quick inline and on-wafer electrical test capabilities. These enable process control verification at critical steps and on wafer extraction of electrical yield at final wafer fabrication. Capabilities cover I/V and S-parameter data for DC/RF discrete device characterization, Pulsed IV and reliability testing in various temperatures with forming gas at atmosphere.
