Our epitaxial growth and thermal processing modules have leading-edge tools and an experienced staff to collaborate on a variety of material fabrication and annealing processes. Our molecular beam epitaxy tools include III-N and III- As/Sb chambers. Metal organic chemical vapor deposition capabilities include Aixtron, Thomas Swan, and Emcore systems. We have 6 rapid thermal processors capable of temperatures from 275 to 1200° C, 4 atmospheric bake ovens, a vacuum oven, and a complement of atmospheric and vacuum hot plates. Our tools for organic synthesis and inorganic purification include an atmospheric dry oxidation furnace, a pyrolysis furnace, and a vacuum resistance furnace with inert and reducing gases.
