By ATLANT 3D
Precision-driven microfabrication for enhanced sensory technologies. Unlock New Possibilities in MEMS & Sensor Development Traditional MEMS and sensor manufacturing faces significant challenges in achieving uniform thin-film deposition on complex 3D structures. Issues like stiction, material durability, and performance limitations under extreme conditions slow innovation and increase costs. Master Materials at the Molecular Level - Investigate functional materials for MEMS applications (piezoelectric - ferroelectric - magnetic - thermal-responsive) - Develop specialized coatings for nanoparticles and nanorods - Create both nanoparticles and dense layers - Ensure complete material compatibility with existing MEMS fabrication Turn Concepts into Reality Faster - Integrate with standard process flows - Create novel sensor designs for enhanced sensitivity - Optimize multi-layer architectures - Achieve seamless integration on complex surfaces Build What Others Can’t - Local deposition of sensors on complex geometries - Prototype environmental sensors (ions - gas - temperature - pressure) - Design experiments to optimize material properties - Enable compact integration into single platform - Provide local encapsulation of sensing elements Engineering at the Edge of Possibility - Processing temperature range: Room temperature to 300°C - Current line width: 400 µm (25 µm in development) - Variable process speed: 0.1 mm/s to 100 mm/s - Conformal deposition depth: Up to 60 µm - Material library: 450+ ALD materials Your Material Palette - Metal oxides: ZnO, TiO2, SnO2, V2O5, Ga2O3, CuO - Specialized compounds: IrO2, HfO2 Build on Any Foundation - Silicon - SiC - GaN wafers - Glass - Fused silica - Borosilicates - Polymers
