NW
Lithography & NanopatterningFabrication & Surface Engineering

Photoresist patterning

By applied microSWISS

SEM-image of photoresist test-pattern with excellent vertical sidewalls and high aspect ratio. SEM-image of photoresist-pattern with azimutal sectors SEM-image of photoresist-pattern with drafted sidewalls SEM-image of photoresist-feature with drafted sidewalls