By Asia Pacific Microsystems Inc.
Metrology - SEM/ EDS (Energy Dispersive X-ray Spectroscopy) - White Light Interferometer - IR Microscope - Film Thickness Measurement - CD Measurement - Defect Inspection - Surface Profiler - Film Stress Measurement - Sheet Resistance Measurement (4-point probe) - FTIR - Surface Analysis such as Auger, SIMS, AFM (external partner)
