Rogue Valley Microdevices delivers complete MEMS foundry capabilities from our U.S. fabrication facilities, supporting your device from first process exploration through scalable manufacturing. As a U.S.-based pure-play MEMS foundry, we bring thin film deposition, photolithography, etching, and process integration together under one roof, so your wafers never leave our fab between critical steps. Every process runs in-house on production-capable equipment with controlled manufacturing workflows. That integration reduces development risk, improves wafer-to-wafer consistency, and shortens the path from prototype to production. Our capabilities support MEMS sensors, microfluidics, photonics, and specialty semiconductor devices across healthcare, industrial sensing, aerospace and defense, and communications markets. U.S.-Based Manufacturing: MEMS fabrication facilities in Medford, Oregon and Palm Bay, Florida ITAR-Registered: ITAR-registered foundry supporting defense and export-controlled programs Pure-Play MEMS Foundry: Focused entirely on fabricating customer devices All Processing In-House: From thin film deposition through etch and lift-off Direct Engineering Collaboration: Transparency into every process decision Prototype-Friendly Engagement: Scales from single-lot process development to volume production Integrated fabrication sequence: - Substrate Preparation and Masking: Thermal oxide growth combined with low-stress LPCVD silicon nitride deposition - Patterning and Lithography: Front-to-back alignment with spin or spray photoresist coating for varied topography - Structure Definition and Etching: High-aspect-ratio DRIE alongside anisotropic KOH and TMAH wet etch chemistries - Metallization: PVD metal deposition with bilayer resist lift-off for platinum, gold, and specialty metal patterns Large foundries optimize for high-volume standard products. We optimize for your device. From the first process review, our engineers work directly with your team, explain the reasoning behind every process decision, and share the data behind it. You gain: - Direct access to the engineers running your wafers - Transparent, data-driven process development - A clear record of exactly how your device is built - One accountable partner from deposition through final etch Because prototypes and production wafers run on the same tools in the same fab, moving into manufacturing does not mean re-qualifying your process somewhere else. We plan scalable production pathways from the beginning of development, strengthening domestic supply-chain resilience along the way.
