By SAMCO Inc.
Samco has provided process solutions including Patterned Sapphire Substrate (PSS) fabrication to major HB LED manufacturers. Both single and batch wafer processing are available. PSS Fabrication by Sapphire Etching p-GaN/Active/n-GaN Layer Deposition by MOCVD Expose n-GaN Layer by Dry Etching Device Isolation by GaN Etching Passivation Deposition by PECVD Contact Hole Formation by SiO2 Etching Plasma Dicing
