By Oxford Materials Characterisation Service
For fully-quantitative microanalysis (EPMA) and elemental mapping. Four wave-length dispersive spectrometers detect and measure the X-rays generated by the electron beam hitting the sample. Exact detection limits depend on the element of interest and the overall combination of elements present. Such machines are capable of analysing samples between 5 µm and 50 mm in size, but can detect particles down to a size of 100 nm.
