By INESC Microssistemas e Nanotecnologias
Our labs are equipped with a variety of characterization tools, from material deposition levels to microfabricated devices, supporting quality control of microfabrication processes as well as qualification of materials and devices for both fundamental research and industrial applications. OUR EQUIPMENT - Reflectometer KLA Filmetrics F20 - Profilometer Dektak-XT Advanced system - Profilometer (Tencor Alpha-step 200) - Ellipsometer Semilab SE-2000 - SEM RAITH 150 - Resistivity mapper CMT-SR2000N - AIT - VSM DMS880 - VSM Microsense EZ7 - X-ray difractometer Siemens D5000 - Magnetoresistance measurement setups: 150Oe, 2KOe probers and Autoprober - Noise spectrum analyzer - Vacuum annealing oven with magnetic field Reflectometer KLA Filmetrics F20: For more information about this equipment, please visit the KLA webpage here
