By Northwestern University - NUANCE Center
The EPIC-FIB facility will receive a novel well-equipped state-of-the-art focused ion beam – scanning electron microscope (FIB-SEM) in 2025! This instrumentation can combine ultra-high resolution field emission SEM, and FIB material etch and deposition for nanoscale machining, prototyping, 2D and 3D characterization of a wide range of materials ranging from hard to soft matter. This Ga+ dual-beam system will amongst others be a dedicated workhorse for conventional and advanced (automated) sample preparation for TEM and atom probe tomography (APT) purposes, to complement our Hydra plasma FIB system. Stay tuned for more information! In addition to our state-of-the-art equipment, experienced staff members are on-hand to train and assist users with FIB-SEM work and sample preparation techniques.
