This high-vacuum evaporation service can be used separately or in combination with the pattering service. We can offer e-gun evporation and thermal evaporation of single layer coatings or stacks of thin-film metals. A complete list of available materials can be found under "Specifications". Our service does not include reactive evaporation or metal-oxides. We also take great precaution on particle contamination and are well equipped and trained to deliver high-quality coated wafers, glass-plates and other customer substrates. Loading and unloading takes place under FFU-ceiling. Specifications: List standard available materials: Adhesion layers: Cr, Ti Conductive metal: Ag, Al, Au, Cr, Cu, Mo, Ni, Pd, Pt Wear-resistant coating: TiN Dielectric material: SiO2 Acceptable substrate formats: Round substrates: ø100, ø150, ø200mm Square substrates: 4"x4", 5"x5", 6"x6", 7"x7" Process flexibility: Other materials, substrate formats on request.
