By Boston College - Integrated Sciences Cleanroom and Nanofabrication Facility
Samco RIE-10NR - Internal $40/hr; External Academic $40/hr; External Commercial $95/hr. XeF2 Etch System, XACTIX X-SYS- EXP Xetch - Internal $15/hr; External Academic $20/hr; External Commercial $50/hr. Acid Etching Fume Hood, Reynolds Tech FWS-196-4910 - included in General Cleanroom Use rate. Microwave Plasma Etch, PVATePla PS-210 - included in General Cleanroom Use rate. Solvent Cleaning Fume Hood, Reynolds Tech FWS-196-SS - included in General Cleanroom Use rate.
