By Boston College - Integrated Sciences Cleanroom and Nanofabrication Facility
Sputter Deposition System, AJA International Orion 8 - Internal $40/hour; External Academic $40/hour; External Commercial $95/hr. Benchtop Sputter Deposition, Safematic CCU - Internal $10/run; External Academic $10/run; External Commercial $25/run. Atomic Layer Deposition, Ultratech - Internal $15/hr; External Academic $15/hr; External Commercial $50/hr. Thermal Evaporator, Kurt J. Lesker PVD-75 - Internal $10/hr; External Academic $10/hr; External Commercial $45/hr. PE-CVD, Plasma-Therm Vesaline LL - Internal $40/run; External Academic $40/run; External Commercial $95/run. E-Beam Deposition (w/ion source), Ångstrom Amod - Internal $75/hr; External Academic $75/hr; External Commercial $150/hr. Benchtop Sputter Coater, Safematic CCU - Internal $15/hr; External Academic $15/hr; External Commercial $50/hr. Electroplating System, Reynolds Tech - included in General Cleanroom Use rate.
