By Boston College - Integrated Sciences Cleanroom and Nanofabrication Facility
Scanning Electron Microscope, JEOL JSM-7001F - Internal $44/hr; External Academic $44/hr; External Commercial $105/hr. EDX (on SEM), Oxford - included in SEM rate. Optical Microscope (High Power), Olympus BX61. Reflectometer, Mission Peak Optics MP100-S - included in General Cleanroom Use rate. Surface Profilometer, Veeco Dektak 150 - included in General Cleanroom Use rate. Spectroscopic Ellipsometer, J.A.Woollam Vertical VASE. RF LCR Meter, Agilent 4287A - included in General Cleanroom Use rate. Probe/Test Station, Cascade Microtech M150. Four Point Probe Station, Jandel MHMP/RMS-AR - included in General Cleanroom Use rate.
