By Boston College - Integrated Sciences Cleanroom and Nanofabrication Facility
Mask Aligner, OAI Model 200 - included in General Cleanroom Use rate. Spin Coater, Laurell WS-650 - included in General Cleanroom Use rate. Spin Coater, Laurell WS-400E - included in General Cleanroom Use rate. Hot Plates (2) - included in General Cleanroom Use rate. Thermal Scanning Probe Lithography (t-SPL) system, Heidelberg Instruments Nanofrazor Scholar - Internal $15/hour; External Academic $15/hour; External Commercial $34/hour. Direct Write Maskless Aligner, Heidelberg Instruments µMLA - Internal $10/hour; External Academic $10/hour. YES-310TA HMDS Oven - included in General Cleanroom Use rate.
