By Korea Advanced Nano Fab Center (KANC)
장비안내 LT-HDPCVD(양자팹) - Manager: Haeyong Jeong - haeyong.jeong@kanc.re.kr Superconductor ALD(양자팹) - Manager: Haeyong Jeong - haeyong.jeong@kanc.re.kr E-beam evaporator III - Manager: Soeun Park - soeun.park@kanc.re.kr MOCVD VII (N) - Manager: Keunman Song - keunman.song@kanc.re.kr PECVD III - Manager: Byungou Lee - byungou.lee@kanc.re.kr E-beam evaporator III (R&D) - Manager: Soeun Park - soeun.park@kanc.re.kr E-beam evaporator I (R&D) - Manager: Soeun Park - soeun.park@kanc.re.kr Batch Sputter (ITO) - Manager: Keunwoo Lee - keunwoo.lee@kanc.re.kr Cluster Sputter (Metal) - Manager: Dongkeun Lee - dongkeun.lee@kanc.re.kr E-beam evaporator II(foundry) - Manager: Semin Kang - semin.kang@kanc.re.kr
