By Korea Advanced Nano Fab Center (KANC)
Producing the nano electronic devices focus on 6" compound semiconductor Business oriented pilot scale production and Foundry service Thin Film: E-beam evaporator I (foundry) EI-5(ULVAC); PECVD II (foundry) VL-LA-PECVD(Unaxis); Microwave asher (foundry) Enviro II(ULVAC); Sputter(Cluster) (foundry) SME-200J(ULVAC); Au Plating Machine I & II SWP-C3D(Sungwon Forming); Liftoff Machine VL-6020(M.SETEK); Spin Etcher VE-8200(M.SETEK) Etch: ICP etcher II(foundry) VL-ICP(Unaxis); RIE(foundry) VL-PHF-RIE(Unaxis)
