Quantech is a Danish Research Infrastructure created to support and foster research and industry in the development of quantum devices. We provide access to state-of-the-art manufacturing and characterization equipment to researchers and industrial partners, engaged in the development of emerging technologies in quantum science and related fields. Quantech labs and equipment are open to academic and commercial users. Access to the facilities is granted upon application and according to the following criteria: Compatibility of the planned activity with the equipment specifications. Excellence of the proposed activity and relevance within the field of quantum technologies. Availability of the resources needed to complete the proposed activity. The project is within the limit of Danish legislation. To apply, please contact us with a short description of the proposed activity, expected usage of the tools, and number of users. The tools are subjected to an hourly price rate (per user) and a “reservation” fee. Prices are calculated according to the type of user (KU-partner, Danish academia, commercial activity) and are subjected to changes over time. Please contact the project coordinator for information about prices for individual tools and rules. Electron Beam Lithography Name ELIONIX ELS-F125 Application Direct exposure of electron-sensitive resists like PMMA, ZEP and HSQ for micro- and nano-patterning down to 7 nm line resolution. Characteristics Thermal field emission gun. Acceleration voltages up to 125 kV, probe current up to 300 nA. 100 MHz pattern generator. Specimen Maximum size 4 inch Location H.C. Ørsted Institutet, Universitetsparken 5, 2100 København Ø. Scanning Electron Microscope Name JEOL 7800F prime Application High resolution scanning electron micrographs of wafer/devices during or after processing. Characteristics Low voltage scan (0.01 – 30 kV) Magnification: 10x – 1.000.000x Resolution: 0.7 nm between 1 and 15 kV. Gentle beam system Specimen Small samples up to 1.5 cm for cross section inspection. Wafers up to 2 inch for top down inspection. Location H.C. Ørsted Institutet, Universitetsparken 5, 2100 København Ø. Dilution refrigerator Name BlueFors BF-LD400 Application Cryogen-free system for experiments and measurements requiring milli-Kelvin thermal environment. System is optimised for quantum opto-mechanics with free-space optical beams. Characteristics Base temperature: 7 mK (with blinded viewports) Cooling power at 20 mK: 18 micro-Watts Cooling power at 100 mK: 550 micro-Watts 22h cool-down time. Low-vibration package with cryostat on air-springs. <0.1 nm for f>20Hz. Customized features Free space optical access through 2 horizontal transmission lines and 1 vertical input line. Windows AR coated for 1550nm. Optical fibre access, SMF28e+, 1310-1620 nm. Wiring: 6x low-ohmic wires for positioners; 6x wires for scannes; 12x measurement wires. Optional hermetic sample chamber for He exchange gas cooling. Location Technical University of Danmark Department of Physics Fysikvej bld. 309-039
