NBI Cleanroom is a research infrastructure user facility for nanofabrication and characterization. Our facility serves research groups at Niels Bohr Institute (NBI), Department of Chemistry (KEMI), external academic groups (e.g. from DTU), and commercial research groups (e.g. Microsoft Quantum, Sparrow Quantum). Specialized in semiconductor and superconductor nanofabrication, we are facilitating state-of-the-art research in quantum device technologies. Our equipment can be utilized for most solid-state materials research. The local NBI Cleanroom team maintains the cleanroom and equipment and trains and supports users of the facility. The team can provide expert consultancy on nanofabrication processing and material characterization, as well as specialist-for-hire services. Our nanofabrication tool portfolio spans a wide range of processing equipment such as: ISO-7 Cleanroom with 6 fume hoods for chemical processing. 2 Elionix electron beam lithography systems (100/125 kV). 3 e-beam metal deposition systems with ion milling and DC/RF sputtering. Direct-write laser system for photolithography. Molecular beam epitaxy system for thin-film deposition and synthesis of nanoscale III-V semiconductor crystals with in-line e-beam metal deposition system for thin film deposition of superconductors. 2 atomic layer deposition systems for oxides (AlOx/HfOx). The facility is open to any research activity that is compatible with our processes and cross-contamination regulations. Examples of compatible material systems are: III-V compound semiconductors, Silicon, Superconductors, Semiconductor-superconductor hybrids, Semiconductor photonic chips.
