Antisticking layers (ASL) are available for replication tools as well as for lithography-masks. ASL are a very useful added functionality to our products when easy mold-separation is essential for your replication process. We do also offer anti-sticking coatings for lithography-masks. An additional ASL can become the best measure to reduced sticking forces between mask and resist-coating. This is very helpful way to avoid mask-contamination due to resist-voids, thus increasing "operating-hours-between-cleaning". This is particularly crucial with thick resists (e.g SU-8) and -inherently- long exposure durations. Our ASL coatings still allow the use of organic solvents (Aceton, IPA, etc.) for intermediate mask-cleaning. Antisticking-coatings are Si-F based and can be refreshed and thereby substantially extending mask-life. Adding an F-Si based ASL on a lithography mask: 1. Customer sends pattern-design (CAD-file, sketch,...) 2. applied microSWISS takes care of maskset-manufacturing 3. SiO2 coating (thickness = 50nm) onto mask 4. CVD processing to apply Antisticking coating 5. Packaging processed mask in original container 6. Shipping with appropriate remarks for handling, cleaning and storage Adding an F-Si based ASL on a Nickel hot-embossing stamp: 1. Customer sends pattern-design (CAD-file, sketch,...) for stamp 2. applied microSWISS to manufactures the hot-embossing stamp 3. SiO2 coating (thickness = 50nm) onto mask 4. CVD processing to apply Antisticking coating 5. Packaging processed stamp in appropriate container 6. Shipping with appropriate remarks for handling, cleaning and storage
